AGS RIE

 

The MPS-RIE is great for day-to-day use at the push of a button.

  • Best built R&D or low volume production tool available
  • SiO2, SiNx, TiW, GaAs, resist, ILD and polyimide, micromachining (MEMS), photonics, HTSC's, and for failure analysis
  • Accepts any size substrate from 1" to 6" wafers, flat panels, or custom packages
  • Easy to use and simple to service
  • Safe, rugged design means high reliability with remarkable uptime
  • Simple 5 piece chamber construction is versatile and easy to upgrade
  • Multi-use process kit with virtually no process memory effect
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