Integrity 26 Thermal Evaporation System, Denton Vacuum

Integrity 26 Thermal Evaporation System, Denton Vacuum

  • Stainless steel, water-cooled, split jar chamber (26” wide x 30” tall)
  • (2) 4 kVA Thermal resistive evaporation supplies with pneumatic shutters
  • Glow discharge assembly with gas control
  • Quartz lamp heating assembly
  • 0-20 rpm rotation assembly with flat plate or dome substrate holder (customer choice)
  • Inficon deposition controller with water-cooled quartz crystal assembly
  • Denton Vacuum PLC control system
  • Automatic pumping
  • Automatic cryogenic pump regeneration
  • Automatic depositions