Nanofabrication Cleanroom Home

architectural rendering of cleanroom courtesy of HALFF Associates, Inc

The UNT Nanofabrication Cleanroom is maintained by the University of North Texas to support the research needs of faculty and students from a broad range of engineering and science disciplines.   The cleanroom occupies approximately 3000 sq. ft. of clean space and includes a Class 100 lithography area and a Class 10,000 wet and dry processing and characterization area.  Initial capabilities will emphasize nano/micro device development and thin film techniques.  Highlights of the tool list include:

  • Electron Beam Lithography/Scanning Electron Microscope
  • Electon Beam and Sputtering Combo Thin Film Deposition System
  • Thermal Evaporation Thin Film Deposition System
  • Direct Write Maskless Laser Lithography System
  • Reactive Ion Etchers (RIE)

For a complete list of tools to be included and the layout of the facility, see the Tools and Instrument page.