The MPS-RIE is great for day-to-day use at the push of a button.
- Best built R&D or low volume production tool available
- SiO2, SiNx, TiW, GaAs, resist, ILD and polyimide, micromachining (MEMS), photonics, HTSC's, and for failure analysis
- Accepts any size substrate from 1" to 6" wafers, flat panels, or custom packages
- Easy to use and simple to service
- Safe, rugged design means high reliability with remarkable uptime
- Simple 5 piece chamber construction is versatile and easy to upgrade
- Multi-use process kit with virtually no process memory effect