MRF: Nanofabrication Cleanroom

architectural rendering of cleanroom courtesy of HALFF Associates, Inc

The UNT Material Research Facility: Nanofabrication Cleanroom is maintained by the University of North Texas to support the research needs of faculty and students from a broad range of engineering and science disciplines.   The cleanroom occupies approximately 3000 sq. ft. of clean space and includes a Class 100 lithography area and a Class 10,000 wet and dry processing and characterization area.  Initial capabilities will emphasize nano/micro device development, Photomask fabrication, OLED device fabrication and thin film techniques.  Highlights of the tool list include:

  • Electron Beam Lithography/Scanning Electron Microscope
  • Ion Assist Electon Beam and Sputtering Combo Thin Film Deposition System
  • KLA-Tenco Profiler
  • Heidelberg DWL 66s Maskless Laser Lithography System
  • Laurell chemical processing stations
  • Reactive Ion Etchers (RIE)
  • Trovato organic deposition system

For a complete list of tools to be included and the layout of the facility , see the Tools and Instrument page and rates for cleanroom tools at Cleanroom User Fee Structure. Tool scheduling at UNT FOM.

For steps to become a cleanroom user, see the How to become a cleanroom user. Other user related information is under User Information.

Updated cleanroom capacity examples!

MRF brochure