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UNT | Est. 1890
UNT
University of North Texas

Nanofabrication Cleanroom Facility

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Nanofabrication Cleanroom Facility

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  • Cleanroom Tool Standard Operating Procedures (SOP)

Cleanroom Tool Standard Operating Procedures (SOP)

Standard Operating Procedures:

  • Heidelberg DWL-66 Laser Writer Short Manual
  • Heidelberg DWL-66 Laser Writer Long Manual
  • EVG 610 Mask Aligner
  • Laurell WS-650Mz Spin Coater
  • JEOL JSM 7001F SEM Imaging Short Manual
  • XENOS XPG2 EBL Short Manual
  • Reactiv Ion Etcher (dielectric material)
  • HP 61 Hot Plate
  • UV Ozone Cleaner
  • KLA-Tencor Profiler D-300
  • ECP EBL Pattern Edit manual
  • ECP EBL Pattern User manual
  • Nanomaster Dual Ebeam Short Manual
  • Trovato OLED system
  • Oerlikon Ebeam system
  • Oerlikon sputtering system
  • Parylene Labcoter 2010
  • West Bond 7476D Wirebonder
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  •  MRF.CLEANROOM@unt.edu
  •  940-369-5318

Nanofabrication Cleanroom Facility

  UNT Discovery Park
  3940 N. Elm St., E-151
Denton, Texas 76207-7102
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