Cleanroom Tool Standard Operating Procedures (SOP)
Standard Operating Procedures:
- Heidelberg DWL-66fs laser writer
- Laurell WS-650Mz spin coater
- JEOL JSM 7001F SEM imaging
- Reactiv Ion Etcher (dielectric material)
- HP 61 hot plate
- UV ozone cleaner
- Denton Thermal Evaporator
- ECP EBL pattern edit manual
- ECP EBL patter user manual
- Nanomaster Dual Ebeam manual
- Trovato OLED system
- Oerlikon Ebeam system
- Oerlikon sputtering system